Semiconductor/Photovoltaic

1/2" Point of Use Pressure Regulators

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Regulator	Description	Product Info.	Source Pressure	Delivery Pressure	Certified Inboard Leak Rate	Flow Range	Body Material
44-3200 Series Enlarged View	Single Stage, High Flow Metal to metal diaphragm seals NPT porting 10 Ra microinch finishes Cv=1.0, 1.8	Catalog CAD	500 PSIG	25, 50, 100, 150, 200 PSIG	2X10^-8	0-550, 0-900 SLPM	316L SST or Brass
64-3200 Series Enlarged View	Single Stage Ultra-High Purity High Flow BSGS Tied diaphragm design 10 Ra microinch finishes Hastelloy® trim available Cv=1.2	Catalog CAD	150, 1000, 1500 PSIG	30, 60, 100, 150, 200 PSIG	1X10^-9	0-900 SLPM	316L SST
64-5400 Series Enlarged View	Single Stage Ultra-High Purity High Flow Free poppet design Electropolish or Precision Electro-Polish 10 Ra microinch finish Cv=1.0	Catalog CAD	600 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-550 SLPM	316L SST
74-3000 Series Enlarged View	Single Stage Ultra-High Purity High Flow Internally threadless Electropolish or Precision Electro-Polish 5 Ra or 10 Ra microinch finishes Free poppet design Cv=.5	Catalog CAD	600, 1000 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-500 SLPM	316L SST VAR
74-3800 Series Enlarged View	Single Stage Ultra-High Purity High Flow Internally springless & threadless Electropolish or Precision Electro-Polish 5 Ra or 10 Ra microinch finishes Tied diaphragm design Cv=.5	Catalog CAD	600, 1000, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-500 SLPM	316L SST VAR
23 Series Enlarged View	Single Stage Ultra-High Purity High Flow Internally springless & threadless Electropolish or Precision Electro-Polish 5 Ra or 10 Ra microinch finishes Free poppet or tied diaphragm Cv=1.8	Catalog CAD	150, 250 PSIG	30, 60, 100 PSIG	1X10^-9	0-950 SLPM	316L SST VAR

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TESCOM Products: HPC 1/2' Point of Use Pressure Regulators