Semiconductor/Photovoltaic

Facility & BA Grade Pressure Regulators

Regulator	Description	Product Info.	Source Pressure	Delivery Pressure	Certified Inboard Leak Rate	Flow Range	Body Material
22-2200 Series Enlarged View	BA grade Metal to metal diaphragm seals 25 Ra microinch finishes Cv=.24	Catalog CAD	250 PSIG	30, 60, 100, 150 PSIG	<2X10^-8	0-100 SLP	316 SS or Brass
22-5400 Series Enlarged View	Single stage, High Flow BA grade Free poppet design 25 Ra microinch finishes Cv=1.0	Catalog CAD	600 PSIG	30, 60, 100, 150 PSIG	<1X10^-8	550 SLPM	316L SS
44-3200 Series Enlarged View	Single Stage, High Flow Metal to metal diaphragm seals NPT porting 10 Ra microinch finishes Cv=1.0, 1.8	Catalog CAD	500 PSIG	25, 50, 100, 150, 200 PSIG	<2X10^-8	1000 SLPM (35 scfm)	316 SST
449-260 Series Enlarged View	High flow 10 Ra microinch finishes Cv = 2.8	CAD	500 PSIG	25, 50, 100, 150, 200 PSIG	<2X10^-8	1700 SLPM	316L SST
DH-16 Enlarged View	BA Grade Single stage High flow 25 Ra microinch finishes Cv = 5.0	Catalog CAD	500 PSIG	50, 100, 150 PSIG	^NA	7075 SLPM (250 SCFM)	316 SST
15 Series Enlarged View	High Purity Internally threadless 10 Ra microinch finishes Spring or bellows dome load Cv=8, 20	Catalog CAD	300 PSIG	130 PSIG	< 1X10^-9	11,300 SLPM 100-28,300 SLPM	316L SS

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TESCOM Products: HPC Facility & BA Grade Pressure Regulators